Description: 200mm LPCVD furnace, tube 1: TEOS/anneal, tube 2:Nitride/poly, gas connections: air low N2, N2, FG1, Ar, O2, SiH2Cl2(DCS), SiH4, NH3, 2 Kashiyama vacuum pumps with blowers, furnace dims: 66x36x78, gas module dims: 18x36x78, power req: 480v, 250amps max, 2002 vintage,complete specifications upon request.
Price: 89500 USD
Location: San Jose, California
End Time: 2024-01-20T16:36:18.000Z
Shipping Cost: N/A USD
Product Images
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Item Specifics
Restocking Fee: No
Return shipping will be paid by: Buyer
All returns accepted: Returns Accepted
Item must be returned within: 14 Days
Refund will be given as: Money Back
Model: SBR200355 Bandit 218 MS LH
Brand: MRL Industries
